kokusai 5TOT057518

kokusai 5TOT057518
About Kokusai Electric

Kokusai Electric is a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers. Kokusai Electric produces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers. Kokusai Electric enables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C°

★High-productivity Batch Processing System “AdvancedAce¬-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers “VERTRON¬ Revolution”



Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System “MARORA¬”

★Single wafer Annealing system “TANDUO¬”

★Dry Resist Strip System “Lambda300”


Advanced Thermal Process Technology

Overview



KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD¬).
The BCD¬ technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Recommend

MA-0329-001
MC-4/11/10-400
MC-4/11/22-400
ME4U07AAA
PCI-85
SCTUST21​

IS200VTURH1BAA IS200VTURH1B
IS200TVIBH2BBB IS200TVIBH2B
IS200TBCIH1BBC IS200TBCIH1B
6AV3627-1QL00-0AX0
6AV6542-0AG10-0AX0
6AV6640-0CA01-0AX0
6AV6643-0BA01-1AX0