kokusai 3FOT021464

kokusai 3FOT021464
About Kokusai Electric

Kokusai Electric is a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers. Kokusai Electric produces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers. Kokusai Electric enables the increasingly high functionality and high performance of semiconductors.



Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C°

★High-productivity Batch Processing System “AdvancedAce¬-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers “VERTRON¬ Revolution”



Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System “MARORA¬”

★Single wafer Annealing system “TANDUO¬”

★Dry Resist Strip System “Lambda300”


Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD¬).
The BCD¬ technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination



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