Silicon Pressure Sensor Die/Wafer

Description
The series of pressure sensor is a small size piezo-resistive pressure sensor. The Die size is 1x1mm2. When the input voltage is 3VDC the sensor produces mV DC output voltage which is direct proportion of the input pressure. Pressure sensor is the absolute pressure sensor, and we can also offer the differential pressure mode. All the products can be customized according to your requirement.


Features

Solid, MEMS technique, high reliability
Low cost, tiny size
Standard pressure range: 0-100KPa;0-150KPa;0-700KPa;0-1700KPa
Nonlinearity: < 0.20%FSO
Silicon/silicon bonding wafer, high stability


Application
For high resolution absolute sensor systems
Engine control
Tire Gauge
Barometers, Altimeters, Variometers, Sphygmomanometer

Min Typ Max Unit Remarks
Excitation Voltage 5.0 V
Excitation Current 1 mA
Span
FS Rang 100KPa 50 70 90 mV 1


150KPa 70 100 150 mV
200KPa 70 100 150 mV
350KPa 70 100 150 mV
700KPa 70 100 150 mV
1000KPa 80 120 180 mV
1.7MPa 100 150 200 mV
Offset -35 35 mV 2
TC Span -24 -19 -15.5 %FS/100 3
TC Offset -7 +7 %FS/100 3
TCR +18 +22 +33 % /100 3
Linearity -0.45 -0.15 +0.45 %FS 4
Bridge impedance 5 KΩ
Proof Pressure 2X Fixed FS
Burst Pressure 4X Fixed FS
Operating Temperature -40 +125
Storage Temperature -55 +150 Notes:
1. Measured at 5V constant voltage excitation.
2. The offset is ±50mV for 100KPa,150KPa
3. Measured from 0 to 60 C
4. Defined as best straight line.

Full Scale Pressure
kPa bar mbar PSI atm mmHg mmH2O kg/cm 2
100 1 100 15 0.99 750 10207 1
700 7 700 102 6.9 5250 71451 7.1
1700 17 1700 247 16.8 12754 173524 17.3


Model Pressure Ranges
KPa PSA
100 010
200
PSA 070 020
350 035
700 070
1000
Pressure range
Pressure type 100
1700 170
3500 350